This standard is applicable to electronic grade oxygen used in the production process of semiconductor discrete devices and integrated circuits. According to its usage requirements, electronic grade oxygen is divided into two levels, with the code of electronic grade I oxygen being DZO2- I; Grade II argon code: DZO2- II
SJ 2796-1987 Electronic Grade Oxygen
Chromatographic Column: GDX-104
Specification: 2m * 2mm
Particle size: 60-80 mesh
Application: Shimadzu GC14C, GC-2010, GC-2014, GC-2030, Agilent 6890789088608890; Thermo Fisher, Varian, Brooke
Separation: SJ 2796-1987 Determination of Trace Methane in Electronic Grade Oxygen - Hydrogen Flame Chromatography Method
Features: Good separation, symmetrical peak shape, no tail detachment
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本標準適用于半導體分立器件和集成電路生產(chǎn)工藝過程中使用的電子級氧、按其使用要求電子級氧分為兩級，代號為：電子 Ⅰ級氧代號為：DZO2-Ⅰ ; Ⅱ級氬代號為：DZO2- Ⅱ
SJ 2796-1987電子級氧
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色譜柱：GDX-104
規(guī)格：2m*2mm
粒度：60-80目
應用：島津GC14C，GC-2010，GC-2014，GC-2030,安捷倫6890,7890,8860,8890；賽默飛，瓦里安，布魯克
分離：SJ 2796-1987電子級氧中痕量甲烷的測定方法 氫焰色譜法
特點：分離好，峰型對稱，不脫尾
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